DOI: 

Optoelektron. napìvprovìd. teh. 61, 171-184 (2026)

E.V. Beliak, O.V. Yevtushevska, Yu.I. Chehil, A.A. Kryuchyn. 

COMPARATIVE ANALYSIS OF MODERN TECHNOLOGICAL APPROACHES TO FORMING MICRO-OPTICAL STRUCTURES 

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