https://doi.org/10.15407/iopt.2021.56.071


Optoelectron. Semicond. Tech. 56, 71-82 (2021)

I.Z. Indutnyi, V.I. Mynko, M.V. Sopinskyy, V.A. Dan’ko, P.M. Lytvyn


INVESTIGATION OF THE SURFACE PLASMON-POLARITONS EXCITATION EFFICIENCY ON ALUMINUM GRATINGS, TAKING INTO ACCOUNT DIFFRACTED RADIATION

Detailed studies of the efficiency of excitation of surface plasmon-polaritons (SPP) on aluminum gratings with a period a = 694 nm, which exceeds the incident wavelength of λ = 632,8 nm, have been carried out. The gratings relief depth (h) range was 6–135 nm. Research samples were formed on As40S30Se30 chalcogenide photoresist films using interference lithography and vacuum thermal deposition of an opaque aluminum layer about 80 nm thick. An atomic force microscope was used to determine the groove profile shape and the grating relief depth. The study of the SPP excitation features was carried out on a stand mounted on the basis of a G5M goniometer and an FS-5 Fedorov stage by measuring the angular dependences of the intensity of specularly reflected and diffracted p-polarized radiation of He-Ne laser. When determining the SPP excitation efficiency, the resonance values of both specular reflection and reflection in the -1st DO were taken into account.

It was found that the dependence of the integral plasmon absorption on the grating modulation depth (h/a) is described by a somewhat asymmetric curve with a wide maximum, the position of which corresponds to an h/a value of about 0.07 and a half-width of about 0.123. This allows to excite SPP with an efficiency ≥ 80% of the maximum value on the gratings with the 0,05-0,105 h/a range. The half-width of the plasmon minimum of the reflection in the -1st DO is less than in the specular reflection, which can increase sensitivity of sensor devices when registering the shift of the minimum from angular measurements. The dependence of the half-width of the SPP reflection minima on the grating modulation depth is close to quadratic. In the investigated h/a range (from 0.009 to 0.194), the maximum dynamic range of the reflection coefficient is two orders of magnitude and is achieved in specular reflection for gratings with

h/a ≈ 0.075.

Keywords: surface plasmon-polaritons, aluminium diffraction gratings, interference lithography, chalcogenide photoresists.