Optoelectron. Semicond. Tech. 52, 37-49 (2017)

G.V. Dorozinsky, О.М. Lyapin, H.V. Dorozinska, V.P. Maslov

State-of-the art and problems in developing sеnsor elements of devices basеd on surface plasmon resonance phenomenon (Review)

Considered in this review have been main directions of developing technology and construction of the available sensors based on surface plasmon resonance (SPR) phenomenon to increase their sensitivity and accuracy of measurements. It has been shown that reducing roughness of the plasmon carrying layer in the sensor as well as application of an additional covering dielectric layer with developed surface enables more than two-fold increase in the sensitivity due to the twice increased surface of interaction between the sensor and studied substance. The main technical way enabling to diminish surface roughness is the thermal annealing, and the best result is usually reached for the annealing temperature 120 °С. In most cases, as a dielectric layer they use metal oxides Al2O3, TiO2, SiOx and ZnO, which allows attaining the detection limit in changes of the studied substance refraction index close to 1·10–9, what is one order better than that in available commercial analytic devices based on SPR phenomenon. Shown in the review are promising directions to develop SPR sensorics such as application of multilayer graphene coatings and polymer layers prepared by polymerization in high-frequency plasma of inert gas. In our opinion, further development of these sensors will be directed to increasing the selectivity, wear resistance of the sensitive element surface as well as to developing the methods for regeneration of receptors suitable for multiple using the sensitive elements.

Keywords: surface plasmon resonance, sensors, technology, materials, polymer, graphene.


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Г.В. Дорожинський, О.М. Ляпін, Г.В. Дорожинська, В.П. Маслов


В огляді наведено основні напрямки удосконалення технології та конструкції існуючих сенсорів на основі явища поверхневого плазмонного резонансу (ППР) для збільшення їх чутливості і точності вимірювання. Показано, що зменшення шорсткості поверхні плазмон-несучого шару сенсора і застосування додаткового діелектричного шару з розвиненою поверхнею, дозволяє більш ніж в два рази підвищити чутливість за рахунок збільшення площі поверхні взаємодії сенсора з досліджуваною речовиною. Основним технічним прийомом для зменшення шорсткості поверхні є термічний відпал, а найкращий результат досягається при температурі 120 °С. У більшості випадків як діелектричний шар використовують оксиди металів Al2O3, TiO2, SiOx і ZnO, що дозволяє досягти межі детектування зміни показника заломлення досліджуваної речовини близько 1·10–9. Це на порядок нижче, ніж в існуючих комерційних аналітичних приладах, які працюють на основі явища поверхневого плазмонного резонансу. В огляді наведено перспективні напрямки розвитку сенсорів ППР, такі як застосування багатошарових графенових покриттів і полімерних шарів, отриманих полімеризацією у високочастотній плазмі інертного газу. Подальший розвиток сенсорів на основі поверхневого плазмонного резонансу, на нашу думку, буде спрямований на збільшення селективності, зносостійкості поверхні чутливих елементів, а також на розробку методів регенерації рецепторів для багаторазового використання чутливих елементів.

Ключові слова: поверхневий плазмонний резонанс, сенсори, технологія, матеріали покриттів