https://doi.org/10.15407/jopt.2018.53.124

Optoelectron. Semicond. Tech. 53, 124-139 (2018)

L.O. Revutska, Z.L. Denisova, A.V. Stronski

APPLICATION OF SPIN-COATED CHALCOGENIDE FILMS: MANUFACTURING, PROPERTIES, APPLICATIONS (REVIEW)

This paper reviews the works aimed at fabrication of chalcogenide films spin-coated (SC) from solution, their structural, optical, thermal and other properties, as well as creation of structures based on them. Technology of manufacturing the spin-coated films is similar to application of organic polymers and does not require complex equipment and high temperatures. This process takes place in three stages: preparation of the solution by dissolving the powder of a massive glass, drawing from a solution and heat treatment. Physical properties of SC films are essentially different from those of films obtained using other methods (thermal evaporation or pulsed laser deposition). This article presents a comparison of X-ray diffraction data, Raman spectra of bulk chalcogenide glasses and films prepared by various methods. Structural studies with FTIR spectroscopy and high-resolution X-ray photoelectron spectroscopy (XPS) are also presented. The SC films of chalcogenide glasses were studied by various researchers that used differential scanning calorimetry (DSC). Absorption spectroscopy was used to study the optical properties of thin films. The spin-coated method is convenient for obtaining homogeneous photosensitive amorphous chalcogenide films of various compositions. This technique is characterized by the following photoinduced optical phenomena: photodepolarization, photoinduced anisotropy (in particular, photoinduced linear dichroism), photoinduced diffusion of metals (Ag-photodoption) and polarized photo-doping, which is accompanied by the appearance of optical anisotropy. All these properties of spin-coated chalcogenide films show their prospects for creation of elements and devices of photonics. Sub-micrometer waveguides, microcavity resonators, microscopic infrared lenses, and various hybrid inorganic-organic photonic devices can be manufactured by using the nano-printing method employing spin-coated chalcogenide films.

Keywords: chalcogenide films, spin-coated method, properties, application.